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Browsing by Subject Silicon on insulator
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Showing results 1 to 2 of 2
Issue Date
Title
Author(s)
24-Jun-2022
Design and simulation of Vertical Bi-Directional fringe field tuning of new improved MEMS accelerometer using SOI Technology for stress compensation
Dounkal, M.K.
;
Bhan, R.K.
;
Kumar, N.
11-Apr-2023
Design and tuning of MEMS based cantilevers and combs differential capacitive acceleeometer
Dounkal, M.K.
