Dhillon, P.K.; Sarkar, S.; Sarkar, A.; Moussa, A.; Vandervorst, W.
(2016-05-25)
Si(1 0 0) surface was physically eroded using 1 keV OView the MathML source ion beam and the resultant surface was studied by atomic force microscopy (AFM). The data were analyzed within the framework of dynamic scaling ...