Abstract:
Nanostructure formation at low energy ion beam sputtering on binary surface varying the substrate
temperature has been studied. The surface has been irradiated with Ar+
ion at 700 eV and a fluence of 1.4×
1018 ions.cm-2. Co69Si31 surfaces have shown peculiar nanoscale semi-ellipsoidal structures for different
surface temperatures (100o
-400o
C) at an angle incidence of 67o
. A periodicity is appeared for comparatively
higher temperature perpendicular to ion beam direction. The root mean square (rms) roughness variation has
been summarized. Ion beam polishing effect and the thermal diffusion play crucial role in the pattern
evolution.
